Optical dielectric film passivation-based vertical cavity surface laser and preparation method therefor
作者： Wang Renfan , Zhu Tuo , Yue Aiwen , Luo Biao , Jiang Xuncai
DOI:
关键词: Equivalent series resistance 、 Distributed Bragg reflector 、 Thermal 、 Optoelectronics 、 Surface (mathematics) 、 Laser 、 Semiconductor 、 Dielectric 、 Materials science 、 Passivation
摘要: The invention relates to the technical field of a semiconductor, and provides an optical dielectric film passivation-based vertical cavity surface laser preparation method therefor. is used as DBR (distributed bragg reflector) reflective mirror material, passivation laser. By adopting replace conventional film, series resistance, absorption loss interface can be effectively lowered, thereby improving thermal characteristics laser; also good electric film; therefore, when for laser, process simplified, cost protected, reliability improved.
lens.org 参考文章(4)
Gray Lin, Alexey R Kovsh, Jyh-Shyang Wang, Daniil Alexandrovich Livshits, Edge emitting laser with circular beam ,(2003)
Yanfeng Lao, Chunfang Cao, Cheng Liu, Huizhen Wu, Meng Cao, Vertical-cavity surface-emitting laser with InAsP/InGaAsP quantum well as an active layer and method ,(2010)
Manqing Tan, Xuming Wu, Xiaodong Wang, Long wavelength laser transmitted perpendicular to surface of cavity by using integrated pumping light source ,(2007)