Surface Characteristics of Silicon Nanowires/Nanowalls Subjected to Octadecyltrichlorosilane Deposition and n-octadecane Coating

作者: Bekir Sami Yilbas , Billel Salhi , Muhammad Rizwan Yousaf , Fahad Al-Sulaiman , Haider Ali

DOI: 10.1038/SREP38678

关键词: CoatingIsotropic etchingContact angleLayer (electronics)Chemical engineeringWaferNanowireMaterials scienceWettingOctadecyltrichlorosilane

摘要: In this study, nanowires/nanowalls were generated on a silicon wafer through chemical etching method. Octadecyltrichlorosilane (OTS) was deposited onto the nanowire/nanowall surfaces to alter their hydrophobicity. The hydrophobic characteristics of further modified via 1.5-μm-thick layer n-octadecane coating OTS-deposited surface. resulting assessed using sessile water droplet Scratch and ultraviolet (UV)-visible reflectivity tests conducted measure friction coefficient surfaces. nanowires formed normal surface uniformly extended 10.5 μm OTS enhanced state surface, contact angle increased from 27° 165°. altered This study provides first demonstration that wetting change hydrophilic after melting coating. addition, is reversible; i.e., becomes solidifies at process again occurs in opposite direction melts.

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