Method for forming nanoscale features
作者： Edgar Meyhofer , John A. Nees , Gerard Mourou , Ajit P. Joglekar , Greg Spooner
DOI:
关键词: Ultrashort laser 、 Materials science 、 Range (particle radiation) 、 Wavelength 、 Machining 、 Optics 、 Nanoscopic scale
摘要: Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, size can be reduced far below wavelength light, thus enabling nanomachining wide range materials. The may extremely small (<20 nm) and are highly reproducible.
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