Comparison of 6H-SiC, 3C-SiC, and Si for power devices

作者: M. Bhatnagar , B.J. Baliga

DOI: 10.1109/16.199372

关键词: Power MOSFETSurface coatingOptoelectronicsMOSFETBreakdown voltageMaterials scienceCurrent densityElectrical engineeringSchottky diodePower semiconductor deviceSemiconductor device

摘要: … considered two polytypes of Sic, 6H- and 3C-SiC, which are likely to be the materials of choice for Sic power device fabrication. Advantages of 6H-SiC, also known as a-Sic, are its large …

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