Influence of beam geometry on the dielectric charging of RF MEMS switches
作者： Francesco Solazzi , Benno Margesin , Paola Farinelli , Viviana Mulloni , Giuseppe Resta
DOI:
关键词: Microelectromechanical systems 、 Beam shape 、 Optoelectronics 、 Air bridge 、 Structural engineering 、 Stress conditions 、 Beam geometry 、 Dielectric 、 Cantilever 、 Voltage 、 Materials science
摘要: This paper reports on the evolution of electromechanical properties dielectric-less RF MEMS switches under long-term stress conditions. Two different designs, one based a clamped-clamped air bridge and other cantilever beam, are characterized compared by monitoring pull-in pull-out voltages after long-time application bias voltages. Results show that beam shape assumed snap-down may affect lifetime switch.
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