Clear evidence of mechanical deformation in RF-MEMS switches during prolonged actuation

摘要: Dielectric charging is normally considered one of the most important problems when dealing with RF-MEMS switch reliability, especially for applications which require long-term operation. Other effects are therefore often neglected. In this paper we demonstrate that, case actuation in dielectric-less switches, issue reliability not dielectric but viscoelastic deformation and creep mobile membrane. The measurements analysis performed both a cantilever clamped–clamped configuration, evidencing that first mechanical deformations more pronounced, they can justify almost completely variation release voltage experimentally measured. Mechanical also detected switch, it less evident than previous case. Nonetheless, even responsible de-actuation change detected.