Plasma assisted techniques for deposition of superhard nanocomposite coatings

摘要: Various techniques based on plasma application have been successfully used for deposition of superhard nanocomposite coatings. These possess many varying parameters, which in turn influence the properties a growing coating. Therefore it is important to reveal common regularities, if any, between process parameters and The paper addresses this issue results acquired by assisted CVD PVD methods. Here shown how different such as working gas pressure, bias temperature, affect coating properties, mainly hardness. are found complex effect caused variation one parameter can be similar that another one. This presents an opportunity improve other while maintaining