A potassium electret energy harvester for 3D-stack assembly
作者： Kensuke Misawa , Sugiyama Tatsuhiko , Gen Hashiguchi , Hiroyuki Fujita , Hiroshi Toshiyoshi
DOI: 10.1109/MEMSYS.2015.7051148
关键词: Resonance 、 Stack (abstract data type) 、 Electrical engineering 、 Wafer 、 Optoelectronics 、 Layer (electronics) 、 Silicon on insulator 、 Electret 、 Electrostatics 、 Electrode 、 Materials science
摘要: We report an electrostatic energy harvester based on the potassium ion (K+) electret that could be stacked up into a 3D structure to multiply output power. Vertical comb electrodes are implemented in silicon-on-insulator (SOI) wafer with relatively heavy mass handle layer lower resonance. A single substrate formation exhibited 0.34 µW at 310 Hz for load resistance of 1 MΩ.
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