SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator
作者： Tatsuhiko Sugiyama , Mitsuru Aoyama , Yasushi Shibata , Masato Suzuki , Takashi Konno
关键词: Optoelectronics 、 Silicon oxide 、 Doping 、 Materials science 、 Actuator 、 Silicon dioxide 、 Electrode 、 Comb drive 、 Silicon 、 Electret
摘要: Silicon dioxide electret generated by doping potassium ions will be demonstrated by forming it on a comb-drive actuator. The comb-drive actuator made of silicon on an insulator …
harvard.edu
sci-hub.se 参考文章(4)
Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi, A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator Japanese Journal of Applied Physics. ,vol. 48, pp. 124504- ,(2009) , 10.1143/JJAP.48.124504
P. Günther, SiO2 electrets for electric-field generation in sensors and actuators Sensors and Actuators A-physical. ,vol. 32, pp. 357- 360 ,(1992) , 10.1016/0924-4247(92)80012-R
Yasuo Tarui, Yoshio Komiya, Hiroo Teshima, The Built-in Voltage and the Charge Distributions in the Oxide of MOS Structure Japanese Journal of Applied Physics. ,vol. 6, pp. 191- 204 ,(1967) , 10.1143/JJAP.6.191
R. Kressmann, G.M. Sessler, P. Gunther, Space-charge electrets IEEE Transactions on Dielectrics and Electrical Insulation. ,vol. 3, pp. 607- 623 ,(1996) , 10.1109/94.544184