SiO2 electrets for electric-field generation in sensors and actuators
作者： P. Günther
DOI: 10.1016/0924-4247(92)80012-R
关键词: Actuator 、 Materials science 、 Volume (thermodynamics) 、 Electret 、 Nanotechnology 、 Optoelectronics 、 Electric field 、 Cathode ray
摘要: Abstract Increasingly, electrostatic fields or forces play an important role in micromachined sensors actuators. At the same time, there is a growing demand for permanently chargable insulators, called electrets, which may improve device characteristics considerably. In this paper, new results on SiO 2 electrets are presented. It shown that volume Of can be charged positively at certain depth to amount by means of electron beam. The method measuring mean spatial described and good long-term stability electret charges predicted from thermally activated experiments.
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sci-hub.se 参考文章(16)
P. Gunther, Determination of charge density and location of the charge centroid in electrets with semiconducting substrates international symposium on electrets. pp. 33- 38 ,(1991) , 10.1109/ISE.1991.167174
Dietmar Hohm, Reimund Gerhard(‐Multhaupt), Silicon‐dioxide electret transducer Journal of the Acoustical Society of America. ,vol. 75, pp. 1297- 1298 ,(1984) , 10.1121/1.390738
P. Gunther, Mechanism of charge storage in electron-beam or corona-charged silicon-dioxide electrets IEEE Transactions on Electrical Insulation. ,vol. 26, pp. 42- 48 ,(1991) , 10.1109/14.68225
Minoru Sakata, Yasuyoshi Hatazawa, Akito Omodaka, Tomohiro Kudoh, Hiroyuki Fujita, An electrostatic top motor and its characteristics Sensors and Actuators A-physical. ,vol. 21, pp. 168- 172 ,(1990) , 10.1016/0924-4247(90)85032-Y
Dietmar Hohm, Gisela Hess, A subminiature condenser microphone with silicon nitride membrane and silicon back plate Journal of the Acoustical Society of America. ,vol. 85, pp. 476- 480 ,(1989) , 10.1121/1.397699
B. Gross, H. von Seggern, J. E. West, Positive charging of fluorinated ethylene propylene copolymer (Teflon) by irradiation with low‐energy electrons Journal of Applied Physics. ,vol. 56, pp. 2333- 2336 ,(1984) , 10.1063/1.334269
P. Murphy, K. Hubschi, N. De Rooij, C. Racine, Subminiature silicon integrated electret capacitor microphone IEEE Transactions on Electrical Insulation. ,vol. 24, pp. 495- 498 ,(1989) , 10.1109/14.30895
W. Kühnel, Silicon condenser microphone with integrated field-effect transistor Sensors and Actuators A-physical. ,vol. 26, pp. 521- 525 ,(1991) , 10.1016/0924-4247(91)87043-3
Heinz von Seggern, Identification of TSC peaks and surface-voltage stability in Teflon FEP Journal of Applied Physics. ,vol. 50, pp. 2817- 2821 ,(1979) , 10.1063/1.326193
Akira Yoshikawa, Properties of a movable‐gate–field‐effect structure as an electromechanical sensor Journal of the Acoustical Society of America. ,vol. 64, pp. 725- 730 ,(1978) , 10.1121/1.382036