Very low power consumption MEMS scanner with alkali electret comb drive
作者： Tatsuhiko Sugiyama , Mitsuru Aoyama , Keiko Kawai , Gen Hashiguchi
DOI: 10.1109/MEMSYS.2014.6765870
关键词:
摘要: This paper reports the very low power consumption MEMS scanner that utilizes electrostatic field generated by alkali-ion electret. The electret formed on comb electrodes of provides built-in potential for electro-static actuator so no bias voltage is necessary. prototype was 0.57 μW (bias voltage: DC 0 V, driving AC 9 Vpp, deflection angle: 12°, resonance frequency: 1.4 kHz,). It possible to realize further increasing force factor comb-electrodes.
sci-hub.se 参考文章(11)
Tatsuhiko Sugiyama, Mitsuru Aoyama, Yasushi Shibata, Masato Suzuki, Takashi Konno, Manabu Ataka, Hiroyuki Fujita, Gen Hashiguchi, SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator Applied Physics Express. ,vol. 4, pp. 114103- ,(2011) , 10.1143/APEX.4.114103
Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi, A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator Japanese Journal of Applied Physics. ,vol. 48, pp. 124504- ,(2009) , 10.1143/JJAP.48.124504
P. Günther, SiO2 electrets for electric-field generation in sensors and actuators Sensors and Actuators A-physical. ,vol. 32, pp. 357- 360 ,(1992) , 10.1016/0924-4247(92)80012-R
Kurt E. Petersen, Silicon Torsional Scanning Mirror IBM Journal of Research and Development. ,vol. 24, pp. 631- 637 ,(1980) , 10.1147/RD.245.0631
R.A.C. Altafim, J.A. Giacometti, J.M. Janiszewski, A novel method for electret production using impulse voltages international symposium on electrets. ,vol. 27, pp. 739- 743 ,(1991) , 10.1109/14.155790
K. Yamada, T. Kuriyama, A novel asymmetric silicon micro-mirror for optical beam scanning display international conference on micro electro mechanical systems. pp. 110- 115 ,(1998) , 10.1109/MEMSYS.1998.659738
H. Schenk, P. Durr, T. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kuck, Large deflection micromechanical scanning mirrors for linear scans and pattern generation IEEE Journal of Selected Topics in Quantum Electronics. ,vol. 6, pp. 715- 722 ,(2000) , 10.1109/2944.892609
W.C. Tang, T.-C.H. Nguyen, R.T. Howe, Laterally driven polysilicon resonant microstructures international conference on micro electro mechanical systems. pp. 53- 59 ,(1989) , 10.1109/MEMSYS.1989.77961
Jack W Judy, Richard S Muller, Magnetic microactuation of torsional polysilicon structures Sensors and Actuators A-physical. ,vol. 53, pp. 392- 397 ,(1996) , 10.1016/0924-4247(96)01138-7
M. Honzumi, K. Kashiwagi, K. Hagiwara, Y. Suzuki, Y. Yasuno, H. Kodama, T. Tajima, K. Kidokoro, M. Goto, NOVEL THROUGH-SUBSTRATE CHARGING METHOD FOR ELECTRET GENERATOR USING SOFT X-RAY IRRADIATION 9th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009), Washington DC. ,vol. 173, ,(2009)