Magnetic microactuation of torsional polysilicon structures
作者： Jack W Judy , Richard S Muller
DOI: 10.1016/0924-4247(96)01138-7
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摘要: Abstract A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, equipment. microactuated mirror made from 430 μ m × 130 15 nickel-iron plate attached pair of 400 2.2 beams has been rotated more than 90° out the plane wafer actuated torque greater 3.0 nN m. The flexure structure constrains motion rotation about single axis, which can be an advantage for number microphonic applications (e.g., beam chopping, scanning, steering).
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