Development of prototype apparatus for creating ZnO at low temperatures using diethyl zinc and O−plasmas
作者： Haruhiko Himura , Masayoshi Yamamoto , Naruhiro Mizuike , Akira Kiyohara
关键词: Plasma 、 Zinc 、 Oxygen 、 Nanoparticle 、 Analytical chemistry 、 Radio frequency 、 Materials science 、 General Engineering 、 General Physics and Astronomy
摘要: A new plasma process for fabricating impurity-free zinc oxide films and/or nanoparticles using diethyl (DEZn) and negative oxygen (O−) plasmas at low temperatures has been proposed. To test it experimentally, a prototype apparatus developed. For the O− source, an intermittent discharge with 13.56 MHz radio frequency is employed. As Zn precursor, DEZn successfully transported to reactor chamber without any carrier gas. Initial results obtained developed are also discussed.
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