Semiconductor memory device and manufacturing method thereof
作者： Kazufumi Suenaga , Keiichi Yoshizumi , Kiyoshi Ogata , Hisahiko Abe , Jun Tanaka
DOI:
关键词: Crystal 、 Semiconductor memory 、 Yield (engineering) 、 Optoelectronics 、 Capacitor 、 Ferroelectric thin films 、 Relative standard deviation 、 Polarization (electrochemistry) 、 Materials science
摘要: The present invention is a high quality semiconductor memory device using ferroelectric thin film capacitor as at manufacturing yield, the of specified such that relative standard deviation crystal grain sizes 13% or less, to thereby ensure remanent polarization value and small fatigue (large rewritable number).
lens.org 参考文章(18)
Yasushiro Nishioka, Ferroelectric thin-film capacitor ,(1997)
Shunpei Yamazaki, Semiconductor memory device including a field effect transistor ,(1997)
Günther Schindler, Walter Hartner, Robert Primig, Rainer Bruchhaus, Process for producing high-epsilon dielectric layer or ferroelectric layer ,(1999)
Masamichi Azuma, Carlos A. Paz de Araujo, Michael C. Scott, Joseph D. Cuchiaro, Barium strontium titanate integrated circuit capacitors and process for making the same ,(1993)
Keiichi Nashimoto, Oriented ferroelectric thin film ,(1993)
Kazuo Hirata, Naokichi Hosokawa, Takashi Hase, Toshiyuki Sakuma, Yoichi Miyasaka, Pb(Zr, Ti)O3Thin-Film Preparation by Multitarget Magnetron Sputtering Japanese Journal of Applied Physics. ,vol. 31, pp. 3021- 3024 ,(1992) , 10.1143/JJAP.31.3021
Wan In Lee, J. K. Lee, J. S. Lee, I. K. Yoo, Preparation and electrical properties of high quality PZT thin films on RuOx electrode Integrated Ferroelectrics. ,vol. 10, pp. 145- 154 ,(1995) , 10.1080/10584589508012272
Akihiro Matsuda, Toru Nasu, Yoshihisa Nagano, Yasuhiro Uemoto, Koji Arita, Method of manufacturing capacitor included in semiconductor device and the capacitor thereof ,(1996)
Dong Yeon Park, Eui Joon Yoon, Dong il Chun, Dong Su Lee, Hyun Jung Woo, Apparatus and method of forming preferred orientation-controlled platinum film using oxygen ,(1998)
Masamichi Azuma, Taketoshi Matsuura, Atsuo Inoue, Yasuhiro Shimada, Yasuhiro Uemoto, Semiconductor capacitor dielectric having various grain sizes ,(1996)