作者: O. Hahtela , I. Tittonen
DOI: 10.1007/S00340-005-1920-4
关键词: Oscillation 、 Photothermal therapy 、 Optical power 、 Resonance 、 Intensity modulation 、 Optics 、 Photothermal effect 、 Materials science 、 Beam (structure) 、 Mechanical resonance
摘要: An intensity-modulated HeNe-laser beam was utilized to optically actuate the mechanical resonance of a macroscopic torsional silicon oscillator (f0 = 67 700 Hz, Q 42 100 at p 1 mbar and T 300 K). Both radiation pressure photothermal effects may cause optical actuation device. excitation were studied. In through pressure, actuating laser focused on high-reflectivity-coated surface. case where incident uncoated surface effect shown be dominating factor. Oscillation amplitudes due Δ xrad 1.4 pm xph 4.3 with same power 1.5 mW. The measured frequency quality value not changed when purely mechanisms compared. With absorbed heats oscillator, introducing slight decrease in frequency. Our experiments demonstrate that combined sensitive interferometric measurements can perform dynamic vibration analysis micromechanical components. Prospects using devices for observing extremely weak external forces are discussed.