Advances in ion beam sputtered Sc2O3 for optical interference coatings

摘要: Scandium oxide is an attractive candidate for the engineering of interference coatings, although not widely explored. This paper describes ion beam sputtering Sc 2 O 3 . It shown that structural properties material are affected by deposition conditions. Laser damage in different regimes pulsewidths investigated. These results show 1-on-1 laser fluence, both thermal and deterministic regimes, varies with deposition conditions but this case S-on-1, indicating laser-induced defects are important.