Effect of Annealing on Optical, Mechanical, Electrical Properties and Structure of Scandium Oxide Films
作者： Alexandr Belosludtsev , Yuri Yakimov , Robert Mroczyński , Sandra Stanionytė , Martynas Skapas
关键词: Semiconductor device 、 Refractive index 、 Sputtering 、 Electronic structure 、 Scandium oxide 、 Materials science 、 Composite material 、 Dielectric 、 Annealing (metallurgy) 、 Effective nuclear charge
摘要:
harvard.edu
iaea.org参考文章(29)
Hsiang-Yueh Lai, Kuei-Shu Chang-Liao, Tien-Ko Wang, Ping-Kun Wang, Chin-Lung Cheng, Performance improvement of flash memories with HfOxNy∕SiO2 stack tunnel dielectrics Journal of Vacuum Science & Technology B. ,vol. 24, pp. 1683- 1688 ,(2006) , 10.1116/1.2207153
B. Luo, Jihyun Kim, F. Ren, J. K. Gillespie, R. C. Fitch, J. Sewell, R. Dettmer, G. D. Via, A. Crespo, T. J. Jenkins, B. P. Gila, A. H. Onstine, K. K. Allums, C. R. Abernathy, S. J. Pearton, R. Dwivedi, T. N. Fogarty, R. Wilkins, Electrical characteristics of proton-irradiated Sc2O3 passivated AlGaN/GaN high electron mobility transistors Applied Physics Letters. ,vol. 82, pp. 1428- 1430 ,(2003) , 10.1063/1.1559631
F. Rainer, W. H. Lowdermilk, D. Milam, T. Tuttle Hart, T. L. Lichtenstein, C. K. Carniglia, Scandium oxide coatings for high-power UV laser applications Applied Optics. ,vol. 21, pp. 3685- 3688 ,(1982) , 10.1364/AO.21.003685
W. Heitmann, Reactively evaporated films of scandia and yttria. Applied Optics. ,vol. 12, pp. 394- 397 ,(1973) , 10.1364/AO.12.000394
L.M. Terman, An investigation of surface states at a silicon/silicon oxide interface employing metal-oxide-silicon diodes Solid-State Electronics. ,vol. 5, pp. 285- 299 ,(1962) , 10.1016/0038-1101(62)90111-9
Z. Xu, A. Daga, Haydn Chen, Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition Applied Physics Letters. ,vol. 79, pp. 3782- 3784 ,(2001) , 10.1063/1.1424072
Qingying Wu, Jianhua Liang, Jinhua Liu, Wenzeng Bing, Xinggui Long, Shunzhong Luo, Characteristics of microstructure and mechanical properties of Sc films as a function of substrate temperature Applied Surface Science. ,vol. 258, pp. 7421- 7424 ,(2012) , 10.1016/J.APSUSC.2012.04.053
Carmen S. Menoni, Erik M. Krous, Dinesh Patel, Peter Langston, Jonathan Tollerud, Duy N. Nguyen, Luke A. Emmert, Ashot Markosyan, Roger Route, Martin Fejer, Wolfgang Rudolph, Advances in ion beam sputtered Sc2O3 for optical interference coatings Laser Damage Symposium XLII: Annual Symposium on Optical Materials for High Power Lasers. ,vol. 7842, pp. 784202- ,(2010) , 10.1117/12.855604
Ori Yeheskel, Ismail C. Albayrak, Babak Anasori, Michel W. Barsoum, Mechanical and elastic properties of fine-grained polycrystalline scandia and erbia as determined by indentation techniques Journal of The European Ceramic Society. ,vol. 31, pp. 1703- 1712 ,(2011) , 10.1016/J.JEURCERAMSOC.2011.03.030
Andrzej Taube, Robert Mroczyński, Katarzyna Korwin-Mikke, Sylwia Gierałtowska, Jan Szmidt, Anna Piotrowska, Effect of the post-deposition annealing on electrical characteristics of MIS structures with HfO2/SiO2 gate dielectric stacks Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 177, pp. 1281- 1285 ,(2012) , 10.1016/J.MSEB.2011.12.010