Atomic force microscopy cantilever simulation by finite element methods for quantitative atomic force acoustic microscopy measurements
作者： F.J. Espinoza Beltrán , J. Muñoz-Saldaña , D. Torres-Torres , R. Torres-Martínez , G.A. Schneider
关键词: Piezoresponse force microscopy 、 Non-contact atomic force microscopy 、 Magnetic force microscope 、 Kelvin probe force microscope 、 Atomic force acoustic microscopy 、 Materials science 、 Scanning capacitance microscopy 、 Composite material 、 Nanoindentation 、 Conductive atomic force microscopy
摘要: Measurements of vibrational spectra atomic force microscopy (AFM) microprobes in contact with a sample allow good correlation between resonance frequencies shifts and the effective elastic modulus tip-sample system. In this work we use finite element methods for modeling AFM microprobe vibration considering actual features cantilever geometry. This allowed us to predict behavior cantilevers any wide range stiffness. Experimental glass chromium were well reproduced numerical model, stiffness values obtained. We present method correlate experimental spectrum using realistic geometry numerically model surface. Thus, supported reliable (FEM) acoustic can be quantitative technique elastic-modulus measurements. Considering possibility tip-apex wear during measurements, it is necessary perform calibration procedure obtain areas before after each measurement.
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