Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry

作者: H. Arwin , D.E. Aspnes

DOI: 10.1016/0040-6090(84)90019-1

关键词: Critical point (mathematics)Thin filmRange (particle radiation)Condensed matter physicsDielectricMonolayerFunction (mathematics)Materials scienceSensitivity (control systems)OpticsSubstrate (electronics)

摘要: … 5(a) we show the second derivative of (a,) with respect to E for the pyrrole film for different values of (d). We see immediately that the gold-derived spectral feature at 2.5 eV can be …

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