Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics
作者： Sherif Sedky , Ann Witvrouw , Kris Baert
DOI: 10.1016/S0924-4247(01)00811-1
关键词: Germanium 、 Polycrystalline silicon 、 Thin film 、 CMOS 、 Surface micromachining 、 Wafer 、 Microelectromechanical systems 、 Materials science 、 Nanotechnology 、 Dopant
摘要: … using polycrystalline silicon germanium (poly SiGe), having a Ge … with Al interconnects and tungsten plugs, without introducing … The electrical and mechanical properties of poly SiGe …
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S. Sedky, P. Fiorini, M. Caymax, A. Verbist, C. Baert, Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys Sensors. ,vol. 1, pp. 237- 240 ,(1997) , 10.1109/SENSOR.1997.613627
Sherif Sedky, Ann Witvrouw, Annelies Saerens, Paul Van Houtte, Jef Poortmans, Kris Baert, Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 °C Journal of Materials Research. ,vol. 16, pp. 2607- 2612 ,(2001) , 10.1557/JMR.2001.0358
Yu. B. Plaksina, V. P. Kobyakov, L. P. Chelnokova, Atmospheric oxidation of germanium, tin, and lead telluride powders Powder Metallurgy and Metal Ceramics. ,vol. 12, pp. 218- 222 ,(1973) , 10.1007/BF00795779
Lou H. Hall, Preparation and properties of antireflection coatings by chemical vapor deposition Journal of Applied Physics. ,vol. 43, pp. 4615- 4621 ,(1972) , 10.1063/1.1660977
Yasushi Koubuchi, Effects of Si on electromigration of Al–Cu–Si/TiN layered metallization Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 10, pp. 143- 148 ,(1992) , 10.1116/1.586288
Sherif Sedky, Paolo Fiorini, Matty Caymax, Agnes Verbist, Chris Baert, IR bolometers made of polycrystalline silicon germanium Sensors and Actuators A-physical. ,vol. 66, pp. 193- 199 ,(1998) , 10.1016/S0924-4247(98)00007-7
Youngjoo Yee, Young-Sam Jeon, Jonguk Bu, Geun-ho Kim, Integrated multiwavelength laser source module with micromachined mirrors Miniaturized systems with micro-optics and MEMS. Conference. ,vol. 3878, pp. 398- 406 ,(1999) , 10.1117/12.361285
S. Sedky, A. Witvrouw, H. Bender, K. Baert, Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers IEEE Transactions on Electron Devices. ,vol. 48, pp. 377- 385 ,(2001) , 10.1109/16.902741
Xin Zhang, Tong-Yi Zhang, Man Wong, Yitshak Zohar, Rapid thermal annealing of polysilicon thin films IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 7, pp. 356- 364 ,(1998) , 10.1109/84.735342
S. Sedky, P. Fiorini, K. Baert, L. Hermans, R. Mertens, Characterization and optimization of infrared poly SiGe bolometers IEEE Transactions on Electron Devices. ,vol. 46, pp. 675- 682 ,(1999) , 10.1109/16.753700