Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas
作者： Q. H. Yuan , G. Q. Yin , Y. Xin , Z. Y. Ning
DOI: 10.1063/1.3587108
关键词: Atomic physics 、 Langmuir probe 、 Electron density 、 Plasma parameters 、 Plasma 、 Capacitively coupled plasma 、 Electron temperature 、 Electron 、 Physics 、 Atmospheric-pressure plasma
摘要: The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. transition of heating mode from collisionless to collisional DF-CCP is found be significantly lower than that 13.56 single-frequency CCP. As the increases, EEPFs change bi-Maxwellian Druyvesteyn type which similar 60 dependence densities, effective temperatures, floating potentials, and potentials compared these parameters
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