Thickness Measurements of Thin Films
作者： K. W. PLESSNER
DOI: 10.1038/158915A0
关键词: Optoelectronics 、 Thin film 、 Carbon film 、 Layer by layer 、 Materials science
摘要: I READ with interest the description by Gunn and Scott1 of their method measuring thickness thin films. have been using same for some time, but found necessary a number modifications precautions which it may be helpful to record.
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S Tolansky, New Contributions to Interferometry, with Applications to Crystal Studies Journal of Scientific Instruments. ,vol. 22, pp. 161- 167 ,(1945) , 10.1088/0950-7671/22/9/301
A. F. GUNN, R. A. SCOTT, Measurement of Thickness of Thin Films Nature. ,vol. 158, pp. 621- 621 ,(1946) , 10.1038/158621A0