Interpretation of capacitance-voltage curves for process fault diagnosis: a machine-learning expert system approach
作者： T.M. Crawford , J.A. Walls , A.J. Walton , J.M. Robertson
DOI: 10.1109/ICMTS.1988.672956
关键词: Fault (power engineering) 、 Expert system 、 Multilevel systems 、 Engineering 、 Capacitance voltage 、 Interpretation (logic) 、 Process (computing) 、 Control engineering
摘要: C-V measurement of oxides and their interfaces is a powerful technique but it suffers from the problem data interpre- tation. This makes difficult for non-expert to take full advantage available information. paper discusses application pattern-recognition system which can be used address these problems measurements.
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