引用次数
引用: 7,498
H-指数: 39
I10-指数 : 154
出版物: 551
MEMS resonator tuning using focused ion beam platinum deposition
C.A. Zorman , S. Enderling , M. Mehregany , J.S. Burdess
2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 3 ( 2004) 421 -424
2
2004
Application of Optical, X-Ray and E-Beam Lithography Options to 0.18 Micron Silicon FET Technology
C.M. Reeves , A.M. Gundlach , A.J. Walton , J.T.M. Stevenson
european solid state device research conference 365 -368
1994
Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test Structures Fabricated from Silicon Preforms
B.J.R. Shulver , J.T.M. Stevenson , L.I. Haworth , A.S. Bunting
international conference on microelectronic test structures 21 ( 4) 14 -19
3
2007
Automatic in-line measurement for the identification of killer defects
A.J. Walton , D. Wilson
Semiconductor Processing - Quality through Measurement, IEE Colloquium on
4
1994
The stability and characteristics of a DNA Holliday junction switch.
A.R. Mount , C.P. Mountford , S.A.G. Evans , T.-J. Su
Biophysical Chemistry 124 ( 3) 214 -221
8
2006
Realistic worst-case parameters for circuit simulation
P. Tuohy , A. Gribben , A.J. Walton , J.M. Robertson
IEE Proceedings I Solid State and Electron Devices 134 ( 5) 137 -140
16
1987
Improved measurements of doping profiles in silicon using CV techniques
I.G. McGillivray , J.M. Robertson , A.J. Walton
IEEE Transactions on Electron Devices 35 ( 2) 174 -179
15
1988
A comparison of direct Monte-Carlo and DOE simulations for optimising IC processes
Xuewen Gan , A.J. Walton
international conference on solid state and integrated circuits technology 616 -618
2
1995
Steps towards the development of an experimentally verified simulation of pool nucleate boiling on a silicon wafer with artificial sites
A. Sanna , T.G. Karayiannis , D.B.R. Kenning , C. Hutter
Applied Thermal Engineering 29 ( 7) 1327 -1337
17
2009
Bubble dynamics and flow boiling instabilities in microchannels
D. Bogojevic , K. Sefiane , G. Duursma , A.J. Walton
International Journal of Heat and Mass Transfer 58 ( 1) 663 -675
84
2013
Electrical characterization of platinum deposited by focused ion beam
S. Smith , A.J. Walton , S. Bond , A.W.S. Ross
IEEE Transactions on Semiconductor Manufacturing 16 ( 2) 199 -206
19
2003
Comparison of electrical and SEM CD measurements on binary and alternating aperture phase-shifting masks
S. Smith , M. McCallum , A.J. Walton , J. Tom
IEEE Transactions on Semiconductor Manufacturing 16 ( 2) 266 -272
20
2003
Guest editorial ICMTS 2002
A.J. Walton , A. Mathewson , K.G. McCarthy
IEEE Transactions on Semiconductor Manufacturing 16 ( 2) 179 -180
2003
Design rules to minimize the effect of joule heating in Greek cross test structures
S. Enderling , M.H. Dicks , S. Smith , J.T.M. Stevenson
IEEE Transactions on Semiconductor Manufacturing 17 ( 2) 84 -90
5
2004
Characterization of platinum films produced by UV exposure of a novel photosensitive organometallic material
M.H. Dicks , G.M. Broxton , J. Thomson , J. Lobban
IEEE Transactions on Semiconductor Manufacturing 17 ( 2) 91 -97
3
2004
On-mask CD and overlay test structures for alternating aperture phase shift lithography
S. Smith , M. McCallum , A.J. Walton , J.T.M. Stevenson
IEEE Transactions on Semiconductor Manufacturing 18 ( 2) 238 -245
13
2005
Test chip for the development and evaluation of sensors for measuring stress in metal interconnects
J.G. Terry , S. Smith , A.J. Walton , A.M. Gundlach
IEEE Transactions on Semiconductor Manufacturing 18 ( 2) 255 -261
14
2005
The effect of contact geometry on the value of contact resistivity extracted from Kelvin structures
K.W.J. Findlay , W.J.C. Alexander , A.J. Walton
international conference on microelectronic test structures 133 -138
13
1989
Sources Of Error In Extracting The Specific Contact Resistance From Kelvin Device Measurements
W.J.C. Alexander , A.J. Walton
international conference on microelectronic test structures 17 -22
10
1988
A Novel Device Structure For Studying Gate And Channel Edge Effects In IGFET's
J.A. Serack , A.J. Walton , J.M. Robertson
international conference on microelectronic test structures 67 -72
7
1988
Stewart Smith Y Li Jonathan Terry Richard YongQing Fu Prof. khellil sefiane Jason Crain Colin campbell Marc Desmulliez Kent D. Irwin Andreas Tsiamis Professor Jack (Jikui) Luo Ian Underwood Gene Hilton Andrew Bunting Damian Audley Mansuor Alghane Steve Bull Nicholas Wright Anthony O'Neill Giuseppe Schiavone