Substrate lift pin actuator
作者： Michael D. Willwerth , Roberto Cesar Cotlear
DOI:
关键词: Structural engineering 、 Actuator 、 Engineering 、 Bellows 、 Lift (force) 、 Mechanical engineering
摘要: Implementations described herein provide a lift pin actuator. The actuator has housing. housing an interior volume. A track is disposed in the volume and coupled to center shaft at least partially of guide movably track. At one internal bellows volume, form seal between An elastic member configured apply force that retracts into inlet port introduce fluid generates opposing extend relative
lens.org 参考文章(14)
Ming-Ta Chen, Ming Ju, Chung-Chiang Wang, Ming-Kuan Kao, Wafer loading device ,(2001)
George C Lane, Method of applying a coating ,(1967)
Jared Ahmad Lee, Paul B. Reuter, Aniruddha Pal, Imad Yousif, Martin Jeffrey Salinas, Method and apparatus for substrate transfer and radical confinement ,(2012)
Chandrakant M. Sapkale, Penchala N. Kankanala, Jeffrey C. Hudgens, Nir Merry, Karuppasamy Muthukamtchi, Process chamber gas flow apparatus, systems, and methods ,(2013)
Anchel Sheyner, Valentin Todorow, Xing Lin, Xiaoping Zhou, Andrew Nguyen, Douglas A. Buchberger, Methods and apparatus for controlling substrate temperature in a process chamber ,(2011)
Eric H. Lenz, Perimeter wafer lifting ,(2000)
David T. Or, Rene T. Correa, Eric W. Schieve, Keith K. Koai, Substrate support lift mechanism ,(2004)
Craig Esser, Craig M. Noah, John N. Gregg, Robert M. Jackson, Bulk chemical delivery system ,(1998)
Leonid Selyutin, Talex Sajoto, Jun Zhao, Self-aligning lift mechanism ,(1996)
Steven C. Shatas, Apparatus for depositing diamond and refractory materials comprising rotating antenna ,(1993)