Self-aligning lift mechanism

摘要: A particular configuration of a compact self-aligning lift mechanism is provided for lifting the stem pedestal in processing chamber while minimizing process anomalies due to geometric misalignment and binding moving pieces. The force associated with supporting routed through first arm base portion carrier bracket where it engages linear bearing such that truck track absorb all forces riot aligned bearing. second extending from portion, example set slots adjacent support member, attached which can oppose displacements arms are predictable based on arm. compliant nut used so drive screw be somewhat misaligned without causing binding, misalignment, or non-repeatability substrate positioning during processing.