Fabrication and characterization of highly transparent and conductive indium tin oxide films made with different solution-based methods
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DOI: 10.1088/2053-1591/3/11/116408
关键词: Indium tin oxide 、 Spin coating 、 Materials science 、 Optoelectronics 、 Nanotechnology 、 Thermogravimetric analysis 、 Electrical resistivity and conductivity 、 Nanoparticle 、 Transmittance 、 Fabrication 、 Annealing (metallurgy)
摘要: Solution-based fabrication methods can greatly reduce the cost and broaden applications of transparent conducting oxides films, such as indium tin oxide (ITO) films. In this paper, we report on ITO films fabricated by spin coating glass substrates with two different sources: (1) a commercial nanopowder water dispersion (2) sol-gel solution. A simple fast air annealing process was used to treat as-coated controlled temperature hot plate. Thermogravimetric analysis x-ray diffraction showed that highly crystalline were formed after steps. The final had good combination optical properties electrical properties, especially for made from five layers (92.66% transmittance 8.7 × 10−3 Ω cm resistivity). surface morphology network characterized non-contact current atomic force microscopy. It found paths only partially connected nanoparticle whereas more uniformly distributed surface. We also fabricate liquid crystal display (LCD) device demonstrate excellent our
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