Self-regulated growth of LaVO3 thin films by hybrid molecular beam epitaxy
作者： Hai-Tian Zhang , Liv R. Dedon , Lane W. Martin , Roman Engel-Herbert
DOI: 10.1063/1.4922213
关键词: Lattice constant 、 Analytical chemistry 、 Molecular beam epitaxy 、 Vanadium 、 Stoichiometry 、 Spectroscopy 、 X-ray spectroscopy 、 Perovskite (structure) 、 Thin film 、 Materials science
摘要: LaVO3 thin films were grown on SrTiO3 (001) by hybrid molecular beam epitaxy. A volatile metalorganic precursor, vanadium oxytriisopropoxide (VTIP), and elemental La co-supplied in the presence of a oxygen flux. By keeping flux fixed varying VTIP flux, stoichiometric obtained for range cation ratios, indicating self-regulated growth window. Films under conditions found to have largest lattice parameter, which decreased monotonically with increasing amounts excess or V. Energy dispersive X-ray spectroscopy Rutherford backscattering measurements carried out confirm film compositions. Stoichiometric complex vanadate independent ratios expands upon previously reported perovskite titanates using epitaxy, thus demonstrating general applicability this approach other oxide materials, where precise control over stoichiometry is demanded application.
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