Performance modeling, real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets

摘要: Semiconductor wafer fabrication system (SWFS) is the most complex and capital-intensive phase in entire semiconductor manufacturing cycle. With characteristics of re-entrant processing routes, equipment uncertainty, product diversity improving technologies, great challenges are presented SWFS's modeling, scheduling simulation. To implement efficient production control, this paper provides a timed extended object-oriented Petri nets (TEOPNs) approach to performance real-timed dispatching simulation SWFSs. The TEOPNs models constructed hierarchy accord with real-world organization, new type signal place added into respond dynamic states all facilities. A novel autonomy coordination-based real-time mechanism (A&C-RDM) developed paper, which executes under support TEOPNs-based hybrid control (HRDCS). Owning ability gathering information facilities WIP products, HRDCS can make adaptive decisions according local global status. Two sets key elements dispatching, i.e. state thresholds rules, defined so that A&C-RDM integrate different types rules. set experiments prove efficiency proposed modeling algorithm. In summary, TEOPNs, form cornerstones prototype SWFS, work described carries out an advanced integrated ''modeling-dispatching-simulation'' methodology.