Substrate cooling device and substrate treatment system
作者： Ryuta Ihara , Hideyuki Nitta , Yoshinori Kawagoe
DOI:
关键词: Treatment system 、 Substrate (printing) 、 Groove (joinery) 、 Structural engineering 、 Materials science 、 Mechanism (engineering) 、 Optoelectronics
摘要: A substrate cooling device configured to cool a after treatment, the includes: housing having space house internally; pair of holder sections provided so as face an inner wall housing, and including groove section supporting end neighborhood substrate; mechanism sandwich in direction crossing which each other. According invention, time for treatment can be reduced.
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