Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water-mist-assisted spray pyrolysis
作者： L. Martínez Pérez , M. Aguilar-Frutis , O. Zelaya-Angel , N. Muñoz Aguirre
关键词: Order of magnitude 、 Annealing (metallurgy) 、 Chemical engineering 、 Electrical resistivity and conductivity 、 Reducing atmosphere 、 Thin film 、 Absorption spectroscopy 、 Zinc 、 Diffraction 、 Materials science 、 Mineralogy 、 Electrical and Electronic Engineering 、 Materials Chemistry 、 Electronic, Optical and Magnetic Materials 、 Surfaces, Coatings and Films 、 Surfaces and Interfaces 、 Condensed matter physics
摘要: Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N-dimethylformamide as source materials solution. The addition of water mist a parallel flux to solution stream was also used during of films. The addition improved electrical characteristics films. Fresh samples were then thermally annealed H2 reducing atmosphere. X-ray diffraction patterns show mainly the wurzite crystalline phase An resistivity (ρ) around 2.7 × 10–2 0 cm was measured at room temperature for best undoped film. ρ is approximately one order magnitude lower than resistivities found obtained by means similar non-vacuum
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