The Modeling Routes for the Chemical Vapor Deposition Process
作者： M. Pons , C. Bernard , H. Rouch , R. Madar
DOI: 10.1557/PROC-363-15
关键词: Materials science 、 Environmental chemistry 、 Deposition (phase transition) 、 Chemical engineering 、 Chemical vapor deposition 、 Scientific method
摘要:
sci-hub.se 参考文章(17)
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