An Ellipsometric Model for Establishing Thickness of Thin Water Nanolayers on the Silicon Wafers
作者： Agnieszka Chrzanowska , Piotr Fornal , Natalia Nosidlak , Gabriela Lewińska , Edyta Oziębło
DOI: 10.1007/978-3-319-06611-0_12
关键词: Microstructure 、 Ellipsometry 、 Optoelectronics 、 Silicon 、 Thin film 、 Wafer 、 Nanotribology 、 Substrate (electronics) 、 Materials science 、 Layer (electronics) 、 Optics
摘要: … (DLC-Si) films are covered with adsorbed water [6], yet not because of silica but rather due to the larger content of silanol … these are free silanol aggregates and hydrogen-bonded silanol …
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