In situ study of amorphous to crystalline transition in indium oxide thin films using transmission electron microscopy

作者: I.A. Rauf , L.M. Brown

DOI: 10.1016/0956-7151(94)90048-5

关键词: NucleationChemical engineeringIndiumOxideTransmission electron microscopyCrystallizationCrystallographyIrradiationThin filmAmorphous solidMaterials scienceGeneral Engineering

摘要: Abstract We have studied reactively evaporated thin films of amorphous indium oxide by HREM and attempted to observe the structural changes appearing during course crystallization as are irradiated with electron beam. Two kinds process observed for crystallization: (i) gradual ordering over whole projected area leading no obvious nucleation event, (ii) growth process.

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