An integrated carbon dioxide sensor based on ratiometric thermal-conductivity measurement
作者： Z. Cai , R.H.M. van Veldhoven , A. Falepin , H. Suy , E. Sterckx
DOI: 10.1109/TRANSDUCERS.2015.7181000
关键词: CMOS 、 Carbon dioxide sensor 、 Materials science 、 Realization (systems) 、 Power (physics) 、 Thermal conductivity 、 Transducer 、 Reduction (complexity) 、 Electronic engineering 、 Thermal conductivity measurement
摘要: This paper reports a CO 2 sensor intended for indoor air-quality sensing. Both the thermal-conductivity-based transducer and its readout circuit have been realized in 0.16µm CMOS technology. The circuit, based on an incremental ΔΣ ADC, employs ratiometric measurements to circumvent need stable power reference. achieves 228ppm (1σ) resolution 70s measurement time, while consuming 11.2mW from 1.8V supply. is 2x better than that of state-of-the-art sensors, thus facilitating realization fully-integrated sensors monitoring, significant reduction their cost (>10x) volume (>100x) compared with non-integrated sensors.
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