Optimization of Ultrathin Carbon Overcoats on Hard Disk Media
作者： Reuben Jueyuan Yeo
DOI: 10.1007/978-981-10-4882-1_4
关键词: Cathodic protection 、 Fabrication 、 Optoelectronics 、 Carbon 、 Ion energy 、 Vacuum arc 、 Perpendicular 、 Materials science 、 Ion
摘要: Reduction of the protective carbon overcoat (COC) thickness down to ≤2 nm on hard disk media is essential based current perpendicular magnetic recording technology, in order achieve areal densities >1 Tb/in2. Because its potential comparably higher sp3 bonding and a denser network, hence better film coverage at lower thicknesses, filtered cathodic vacuum arc (FCVA) technique promising option for COC fabrication future media. In addition, ability tune energy incoming C+ ions advantageous optimizing functional properties COC. this chapter, effects ion energy, extent atomic mixing microstructural ultrathin COCs are discussed, how FCVA process can be optimized most desirable
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