LIGA and its applications
作者：
关键词: Nanotechnology 、 Photomask 、 LIGA 、 Microfabrication 、 Microelectromechanical systems 、 Microfluidics 、 Biochip 、 Lithography 、 Resist 、 Materials science
摘要: Introduction I. Technologies Innovative exposure techniques for 3-D microfabrication Large Surface Area Techniques PTFE photo-fabrication by SR (TIEGA process) Photomask Comparisons Galvanics and Molding Simulating New LIGA Processes Commercial Simulation Program Tools Design Assembly Safe Manufacturing II. Applications Market Analysis Commercialization of Optical MEMS Polymer Optics Micromechanics RF Evolution the Spectrometer Microfluidics in Biotechnology (actuators) Biochip Ultrasonic Transducers Swiss Luxury Watches Using Components III. Outlook Extreme Nanostructuring Novel Resist Systems Hard Gold Interferential X-ray Lithography Table-top Synchrotrons Future Light Sources their Application Microfabrication
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