Fabrication of 2-D and 3-D silicon photonic crystals by deep etching
作者： A. Chelnokov , S. David , Kang Wang , F. Marty , J.-M. Lourtioz
DOI: 10.1109/JSTQE.2002.801736
关键词: Silicon 、 Optics 、 Focused ion beam 、 Hybrid silicon laser 、 Reactive-ion etching 、 Silicon photonics 、 Optoelectronics 、 Photonic crystal 、 Materials science 、 Microelectromechanical systems 、 Etching (microfabrication)
摘要: … of holes in silicon with axes following the (110), (101), and (011) directions of an fcc lattice. Two series of holes were actually drilled … silicon PC was a triangular lattice of holes with a 650-…
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