Photo-enhanced pyrolytic MOCVD growth of group II-VI materials
作者： William E. Hoke , James Elliott , Vilnis G. Kreismanis
DOI:
关键词: Inorganic chemistry 、 Decomposition 、 Kinetic energy 、 Group ii 、 Radiation 、 Metalorganic vapour phase epitaxy 、 Reactor pressure vessel 、 Substrate (chemistry) 、 Pyrolytic carbon 、 Materials science
摘要: A photo-enhanced pyrolytic technique for growing Group II-VI materials is described. Reactant vapors preferably low stability reactant which form at relatively temperatures are introduced into a reactor vessel. Disposed in the vessel substrate heated to growth temperature of generally less than about 400° C. The surface illuminated by ultraviolet radiation and during decomposition vessel, kinetic energy migrating species on increased resulting reduction defect levels material grown over substrate.
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