Hydrogen dilution profiling for hydrogenated microcrystalline silicon solar cells
作者： Baojie Yan , Guozhen Yue , Jeffrey Yang , Subhendu Guha , D. L. Williamson
DOI: 10.1063/1.1788877
关键词: Volume fraction 、 Analytical chemistry 、 Microstructure 、 Raman spectroscopy 、 Silicon 、 Grain size 、 Materials science 、 Thin film 、 Hydrogen 、 Microcrystalline
摘要: The structural properties of hydrogenated microcrystalline silicon solar cells are investigated using Raman, x-ray diffraction, and atomic force microscopy. experimental results showed a significant increase volume fraction grain size with increasing film thickness. correlation between the cell performance microstructure suggests that thickness is main reason for deterioration as intrinsic layer increases. By varying hydrogen dilution in gas mixture during deposition, evolution has been controlled significantly improved.
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