作者: R. P. Goehner , J. R. Michael
DOI: 10.1007/978-1-4615-1797-9_62
关键词: Conventional transmission electron microscope 、 Crystallography 、 Kikuchi line 、 Scanning electron microscope 、 Electron beam-induced deposition 、 Scanning transmission electron microscopy 、 Environmental scanning electron microscope 、 Physics 、 Optics 、 Scanning confocal electron microscopy 、 Electron backscatter diffraction
摘要: The development of a new charge coupled device (CCD)-based detector for the scanning electron microscope (SEM) has allowed high quality backscattered Kikuchi patterns (BEKP) suitable crystallographic analysis to be collected. These BEKPs can used texture, phase and microstress analysis. This CCD system, also equipped with special filter removing electrons, which allows us image low intensity, highly divergent x-ray diffraction (Kossel) patterns. Kossel are utilized accurate measurement d-spacings residual stress lattice parameter measurements. 19 refs., 4 figs.