Appllied crystallography in the scanning electron microscope using a CCD detector

作者: R. P. Goehner , J. R. Michael

DOI: 10.1007/978-1-4615-1797-9_62

关键词: Conventional transmission electron microscopeCrystallographyKikuchi lineScanning electron microscopeElectron beam-induced depositionScanning transmission electron microscopyEnvironmental scanning electron microscopePhysicsOpticsScanning confocal electron microscopyElectron backscatter diffraction

摘要: The development of a new charge coupled device (CCD)-based detector for the scanning electron microscope (SEM) has allowed high quality backscattered Kikuchi patterns (BEKP) suitable crystallographic analysis to be collected. These BEKPs can used texture, phase and microstress analysis. This CCD system, also equipped with special filter removing electrons, which allows us image low intensity, highly divergent x-ray diffraction (Kossel) patterns. Kossel are utilized accurate measurement d-spacings residual stress lattice parameter measurements. 19 refs., 4 figs.

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