Thin-film semiconductor device and method of manufacturing the same
作者： Kiyofumi Sakaguchi , Takao Yonehara
DOI:
关键词: Optoelectronics 、 Thin film 、 Materials science 、 Semiconductor device 、 Chip 、 Semiconductor 、 Layer (electronics) 、 Integrated circuit 、 Electrical engineering
摘要: A thin-film semiconductor device with a reduced influence on formation layer in separation and method of manufacturing the are provided. The includes step preparing member having film element and/or integrated circuit layer, separating at by pressure fluid, chip forming of, after step, into chips.
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