Electrical fuses and methods of making electrical fuses
作者： Keith Kwong Hon Wong , Baozhen Li , Nicholas R. Hogle , Chih-Chao Yang
DOI:
关键词: Electrically conductive 、 Electrical engineering 、 Dielectric 、 Trench 、 Materials science 、 Fuse (electrical) 、 Copper 、 Layer (electronics) 、 Composite material
摘要: A fuse, a method of making the fuse and circuit containing fuse. The includes an electrically conductive conformal liner on sidewalls bottom trench; copper layer liner, first thickness over trench in lower portion greater than second abutting upper dielectric material trench, filling remaining space said trench.
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