Semiconducting gas sensors

作者: Werner Hagen , Rainer E. Lambrich , Johannes Lagois

DOI: 10.1007/BFB0107978

关键词: MetalSurface conductivityOrders of magnitude (temperature)Layer (electronics)DesorptionChemical engineeringOxidizing agentNanotechnologySemiconductorOxideChemistry

摘要: The surface conductivity of many metal oxide layers is influenced by the composition ambient air. Small quantities reducing or oxidizing gases can change layer resistance several orders magnitude. reversible adsorption desorption processes at semiconductor surfaces are made selective to different choosing appropriate sensor temperatures, catalysts other additives, and preparation techniques.

参考文章(13)
Ingemar Lundström, None, Hydrogen sensitive mos-structures: Part 1: Principles and applications Sensors and Actuators. ,vol. 1, pp. 403- 426 ,(1981) , 10.1016/0250-6874(81)80018-2
Z. M. Jarzebski, J. P. Marton, Physical Properties of SnO2 Materials I . Preparation and Defect Structure Journal of The Electrochemical Society. ,vol. 123, ,(1976) , 10.1149/1.2133010
Henry Windischmann, Peter Mark, A Model for the Operation of a Thin‐Film SnO x Conductance‐Modulation Carbon Monoxide Sensor Journal of The Electrochemical Society. ,vol. 126, pp. 627- 633 ,(1979) , 10.1149/1.2129098
G. Heiland, Homogeneous semiconducting gas sensors Sensors and Actuators. ,vol. 2, pp. 343- 361 ,(1981) , 10.1016/0250-6874(81)80055-8
M FULLER, The catalytic oxidation of carbon monoxide on tin(IV) oxide Journal of Catalysis. ,vol. 29, pp. 441- 450 ,(1973) , 10.1016/0021-9517(73)90251-0
K. I. Lundström, M. S. Shivaraman, C. M. Svensson, A hydrogen-sensitive Pd-gate MOS transistor Journal of Applied Physics. ,vol. 46, pp. 3876- 3881 ,(1975) , 10.1063/1.322185
Tetsuro Seiyama, Akio Kato, Kiyoshi Fujiishi, Masanori Nagatani, A New Detector for Gaseous Components Using Semiconductive Thin Films. Analytical Chemistry. ,vol. 34, pp. 1502- 1503 ,(1962) , 10.1021/AC60191A001
P.A. Cox, R.G. Egdell, C. Harding, W.R. Patterson, P.J. Tavener, Surface properties of antimony doped tin(IV) oxide: A study by electron spectroscopy Surface Science. ,vol. 123, pp. 179- 203 ,(1982) , 10.1016/0039-6028(82)90322-3
P. J. Shaver, ACTIVATED TUNGSTEN OXIDE GAS DETECTORS Applied Physics Letters. ,vol. 11, pp. 255- 257 ,(1967) , 10.1063/1.1755123