Microcrystalline Silicon n-i-p Solar Cells Deposited Entirely by the Hot-Wire Chemical Vapor Deposition Technique

作者: Qi Wang , Eugene Iwaniczko , A. H. Mahan , D. L. Williamson

DOI: 10.1557/PROC-507-903

关键词: Chemical engineeringChemical vapor depositionMicrocrystalline siliconPlasma-enhanced chemical vapor depositionThin filmMonocrystalline siliconCombustion chemical vapor depositionNanocrystalline siliconMaterials scienceHybrid physical-chemical vapor deposition

摘要:

参考文章(4)
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