作者: Hiroko Mori , Taiki Uemura , Hideya Matsuyama , Takashi Yamazaki , Takeshi Soeda
关键词: Physics 、 Emissivity 、 Alpha (navigation) 、 Detector 、 Tracking (particle physics) 、 Optics 、 Detection limit
摘要: We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing background effect. It is possible to lower detection limit of this 4.9×10 -2 alphas/kh-cm 2 using a normal detector. measured various large-scale integration materials technique.