Depth measurement and depth control or automatic depth control for a hollow to be produced by a laser processing device
作者： Martin Reisacher , Peter Hildebrand , Michael Kuhl , Peter Wrba
DOI:
关键词: Calibration 、 Laser processing 、 Measured depth 、 Optics 、 Materials science
摘要: According to a method for depth measurement the depths of measuring points on calibration surface are measured and correction values depending differences between known used stored later correction. layer-wise production hollow horizontal boundaries (xg, yg) removal layer (Si+1) (z) were determined from shape definition hollow. The can be continuously control laser processing device.
google.co.uk 参考文章(52)
William E. Lawson, Laser wire stripper ,(1987)
John L. Waugaman, Contact measurement of container dimensional parameters ,(1993)
Paul M. Grinwald, Method and apparatus for enhanced drug permeation of skin ,(1988)
Paul A. Lovoi, System and process for controlled removal of material to produce a desired surface contour ,(1988)
Takashi Yumura, Miki Kurosawa, Tetsu Yamamoto, Masayuki Sugahara, Kiyoshi Funai, Shuji Ogawa, Laser machining apparatus and method ,(1993)
Walter Kremnitz, Method and system for the automatic orientation and control of a robot ,(1976)
Nobuyuki Zumoto, Yasushi Minamitani, Tadao Minagawa, Masao Izumo, Atsushi Sugitatsu, Hajime Nakatani, Toshinori Yagi, Yoshifumi Matsushita, Optical processing method and apparatus for carrying out the same ,(1995)
Akira Shimase, Takahiko Takahashi, Satoshi Haraichi, Fumikazu Itoh, Multilayered device micro etching method and system ,(1989)
Yun Jun Huh, Etch-ending point measuring method for wet-etch process ,(1996)