Fabrication and electrical properties of SrTiO3/diamond junctions
作者： Guang-chao Chen , Meiyong Liao , Masataka Imura , Kiyomi Nakajima , Yoshimasa Sugimoto
DOI: 10.1016/J.DIAMOND.2010.01.001
关键词: Physical vapor deposition 、 Diamond-like carbon 、 Sputter deposition 、 Materials science 、 Crystallinity 、 Optoelectronics 、 Diamond 、 Mineralogy 、 Amorphous solid 、 Strontium titanate 、 Thin film
摘要: Abstract Strontium titanate (STO) films were directly deposited on Ib (100) single crystal diamond by r.f. magnetron sputtering. The as-deposited STO film was in amorphous state. On the other hand, crystalline obtained under optimized condition of a deposition temperature 250 °C and post-annealing 650 °C. STO/diamond junctions fabricated boron-doped homoepitaxial layers grown p + -type substrates. Electrical properties junction investigated changing surface terminations with hydrogen or oxygen crystallinity film. It found that acted like semi-insulator H-diamond STO/O-diamond behaved Schottky diode. showed complex rectifying behavior. possessed higher dielectric constant as compared to one.
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sci-hub.se 参考文章(22)
Meiyong Liao, Masataka Imura, Xiaosheng Fang, Kiyomi Nakajima, Guangchao Chen, Yasuo Koide, Integration of (PbZr0.52Ti0.48O3) on single crystal diamond as metal-ferroelectric-insulator-semiconductor capacitor Applied Physics Letters. ,vol. 94, pp. 242901- ,(2009) , 10.1063/1.3156030
Qing-li Zhou, Kui-juan Jin, Hui-bin Lu, Peng Han, Zheng-hao Chen, Kun Zhao, Yue-liang Zhou, Guo-zhen Yang, Transport property in SrTiO3 p-n junction EPL. ,vol. 71, pp. 283- 289 ,(2005) , 10.1209/EPL/I2005-10084-4
A. Levstik, C. Filipič, R. Pirc, V. Bobnar, R. Blinc, M. Itoh, Low-temperature phase of SrTiO3 Applied Physics Letters. ,vol. 87, pp. 032901- ,(2005) , 10.1063/1.1999017
C. E. Nebel, Surface-Conducting Diamond Science. ,vol. 318, pp. 1391- 1392 ,(2007) , 10.1126/SCIENCE.1151314
X. W. Zhang, H.-G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, M. Schreck, Epitaxy of cubic boron nitride on (001)-oriented diamond. Nature Materials. ,vol. 2, pp. 312- 315 ,(2003) , 10.1038/NMAT870
Seung‐Hee Nam, Ho‐Gi Kim, The effect of heat treatment on the SrTiO3thin films prepared by radio frequency magnetron sputtering Journal of Applied Physics. ,vol. 72, pp. 2895- 2899 ,(1992) , 10.1063/1.351490
Jan Isberg, Johan Hammersberg, Erik Johansson, Tobias Wikström, Daniel J Twitchen, Andrew J Whitehead, Steven E Coe, Geoffrey A Scarsbrook, High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond Science. ,vol. 297, pp. 1670- 1672 ,(2002) , 10.1126/SCIENCE.1074374
S. Srinivasan, J. Hiller, B. Kabius, O. Auciello, Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems Applied Physics Letters. ,vol. 90, pp. 134101- ,(2007) , 10.1063/1.2679209
F. Maier, J. Ristein, L. Ley, Electron affinity of plasma-hydrogenated and chemically oxidized diamond (100) surfaces Physical Review B. ,vol. 64, pp. 165411- ,(2001) , 10.1103/PHYSREVB.64.165411
Rafi Kalish, Diamond as a unique high-tech electronic material: difficulties and prospects Journal of Physics D. ,vol. 40, pp. 6467- 6478 ,(2007) , 10.1088/0022-3727/40/20/S22