Method for aligning conveying position of object processing system, and object processing system

摘要: There is provided a processing system for object, capable of precisely and efficiently carrying out alignment during teaching operation. In the comprising: apparatuses 12 A B, which have supporting tables 14 B thereon objects to be processed, respectively, serve carry predetermined objects; an orienter/positioner 32 detecting eccentric quantity direction object mounted on reference table 52 ; at least one transfer mechanism 20, 40 A, between apparatus; control part 70 controlling orienter/positioner, obtains position shift aligning substrate when causes to-and-fro conveyance return substrate, as quantity, aligned conveyed by mechanism, one-way modifying conveying toward basis quantity. Thus, operation carried out.