Semiconductor manufacturing systems
作者： Peter van der Meulen
DOI:
关键词: Electronic engineering 、 Bevel 、 Plasma-enhanced chemical vapor deposition 、 Process engineering 、 Semiconductor device fabrication 、 Engineering 、 Semiconductor 、 Process (computing) 、 Vacuum chamber 、 Hexagonal crystal system
摘要: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to increased relatively slow processes. This may include use of hexagonal vacuum chambers additional facets for process modules, circulating modules at a single facet chamber, or the wide having multiple sites. approach be used, example, balance in typical that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.
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